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DKL
DKGA-GEN4
Gen8


 
 
 
 
 
 

Split type Air bearing Stage

 
 
Air-bearing, split-type stage that applies a linear motor for LCD and PDP processing.
Uses laser scale for higher accuracy (optional)
Minimized thermal variation and deflection with axes made of granite.
Application of passive-type isolator for the prevention of vibration (active-type isolator optional).
Application of vacuum chuck and glass pin up/down module (optional)
Synchronization between process equipment and stage motion possible (optional)
 


 
 
Items
Specification
Measuring Range
X
Y
Z
2400 mm
2600 mm
 100 mm
Maximum measurable size of glass
Up to Gen8 Glass(2146 x 2460 mm)
Resolution
X
Y
Z
 0.1 ㎛
0.02 ㎛
 0.1 ㎛
Maximum driving speed
X
Y
Z
600 mm/s
150 mm/s
300 mm/s
Speed Reply
X
Y
± 0.15%(LM Guide)
± 0.10%(Air Bearing)
Maximum accelerate speed
X
Y
0.3 G
0.3 G
Locate accuracy
< ± 1.5 ㎛ (Full travel range)
Scanning accuracy(X)
< ± 0.5 ㎛
Translation accuracy(Y)
< ± 0.5 ㎛
Straightness
< ± 4 ㎛
Chuck Flatness
< ± 100 ㎛
Overall size
X
Y
Z
3600 mm
5400 mm
2100 mm
 
Date 2009-02-04
Former No record
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