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Touch-trigger probes
scanning probes
Non-contact probe


 
 
 
 
 
 
SP80 - ultra high accuracy scanning probe
  • Ultra-high accuracy measurement, provided by digital scale and readheads
  • Long styli carrying capability for access to deep features
  • Isolated optical metrology for direct accurate measurement of stylus deflection
  • Isolated optical metrology for direct accurate measurement of stylus deflection
  • Low inertia mechanism for excellent dynamic responseLI>
PROBE ATTRIBUTES
Ultra-high accuracy scanning probe with three axis measurement (X, Y, Z)
ORIENTATION
SP80:Vertical
SP80H:Horizontal
Size
80.00mm×80.00mm×150.00mm
MEASUREMENT RANGE
SP80:X、Ya nd Z:±2.50mm
SP80H:X、Y:±2.50mm,Z:±1.25mm
OVERTRAVEL RANGE
X and Y protected by a kinematic break out joint on SH80 +Z has a mechanical ‘bump-stop’
X and Y protected by a kinematic break out joint on SH80 +Z has a mechanical ‘bump-stop’
0.02µm
SPRING RATE
SP80:X、Y and Z:1.80N/mm
SP80H:X、Y:1.80N/mm,Z:2.50 N/mm
Weight
SP80:860.00g
SP80H:860.00g
SH80:185.00g
KM80:110.00g
Max stylus weight
SP80:500.00mm
SP80H:200.00mm
Maximum stylus length
500g
CHANGE RACK SYSTEM
MRS with SCP80
Head / end interface
KM80/M5 thread
Head accessories
To Z axis with KM80
End accessories
M5 Stylus

Date 2009-02-04
Former Non-contact probe
Next Touch-trigger probes
 
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