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Inspec-DK4G
Inspec-DK7G
Inspec-DK Series


 
 
 
 
 
 

Non-contact 3D Measuring Machine for 7th-Generation LCD Glass

 
 
Non-contact 3D measuring machine for the external dimensions, edge polishing quantity, and bending of LCD glass
Application of granite-based Air-bearing Stage that uses a linear motor
Application of a passive-type isolator for the isolation of vibration.
Application of Vacuum Chuck and Glass Pin Up/Down Module.
Application of Continuous Image Auto-focus Module.
Application of non-contact measurement method using a high-performance CCD camera and an optical sensor.
 


 
 
Items
Inspec-DK7G
Measuring Range
X
Y
Z
1920 mm
2250 mm
200 mm
Maximum measurable size of glass
Up to Gen7 Glass(1920x2250 mm)
Resolution
0.1 ㎛
Measurement accuracy
Align Key
± 1 ㎛ (3 σ)
Straightness
± 3 ㎛ (3 σ)
Flatness
± 10 ㎛ (3 σ)
Repeatability
± 1.0 ㎛ (3 σ)
Maximum driving speed
X,Y
Z
400 mm/s
200 mm/s
Image detection
B&W progressive scan CCD camera
Illumination
Programmable LED ring light
Programmable LED coaxial light
Difference of step measuring device
Laser Displacement Sensor
(resolution: 0.05 ㎛)
Payload
50 kg
overall size
X
Y
Z
3115 mm
3400 mm
2100 mm
Body weight
13,000 kg
 
Date 2009-02-04
Former Inspec-DK Series
Next Inspec-DK4G
 
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