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  • ELA 4.5G-315C-380
Excimer Laser Annealing Equipment System
ELA 4.5G-315C-380
4.5代柔性AMOLED面板研发设备
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规格参数
Laser ModelTwinVYPER
Laser Wavelength308nm
Laser Stabilized Power(Max.)315W ( 1050mj )
Laser Repetition Rate(Max.)300Hz
Laser Energy Stability≤ 0.8%
Laser Pulse Duration29 ± 5ns
Line Beam Size380mm x 0.3mm
Stage Type4.5G Single Plane Air Bearing X , Y Stage with Z & R aixs

半导体领域专属设备,更多详细参数请与我们直接联系。